File:SALELE at a glance.png

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SALELE_at_a_glance.png ‎(299 × 149 pixels, file size: 2 KB, MIME type: image/png)

Captions

Captions

Plan view of SALELE process steps, taken together
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Summary

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Description
English: Self-aligned litho-etch-litho-etch (SALELE) involves the use of spacers (grey) to help align trenches (red) patterned after earlier trenches (blue). The trenches are cut at different stages (yellow, purple). [1][2]
Date
Source Own work
Author Guiding light

Licensing

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I, the copyright holder of this work, hereby publish it under the following license:
w:en:Creative Commons
attribution share alike
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
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References

[edit]
  1. ↑ SALELE double patterning for 7nm and 5nm nodes
  2. ↑ Y. Drissi et al., Proc. SPIE 10962, 109620V (2019).

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Date/TimeThumbnailDimensionsUserComment
current01:08, 24 March 2021Thumbnail for version as of 01:08, 24 March 2021299 × 149 (2 KB)Guiding light (talk | contribs)Uploaded own work with UploadWizard

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